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System refurbishment is one of the service tasks Bestec provides. This may simply be a maintenance service on mechanical components of a system or include upgrading the system with new components.
Bestec manufactures welded gas lines for different kind of deposition systems (e.g. ALD systems, sputter deposition systems etc.) as part of a Bestec system or as separate components.
Beside the pumping system, the bakeout equipment is an essential component in all UHV systems. Depending on the bakeout concept, it consists of a bake out controller and several fan heaters or heating wires.
Low coast motion systems on the basis of DC motors (typically brushless DC motors) are very common. Therefore BESTEC provides its own controllers for multi axis DC motor driven systems.
Sample preparation processes like plasma etching, heating and surface oxidation or nitration are widely used in UHV deposition systems. Therefore BESTEC provides the integration of corresponding equipment in deposition systems.
Control software is one of the key features of a state of the art deposition system. Therefore Bestec develops for each system a customized software solution on the basis of standard software modules.
Bestec designs and provides different type of customized and high vacuum (HV) or ultra high vacuum (UHV) compatible evaporation source assamblies to be integrated in a Bestec deposition system or as separate component.
Bestec designs and provides different type of customized and ultra high vacuum (UHV) compatible magnetron sputter source assamblies to be integrated in a Bestec deposition system or as separate component.
Ion beam etching systems are mainly used for structuring sample surfaces by moving the sample below a fine spot ion beam. Bestec develop complete systems including the complex sample motion stage.
Cluster tools are typically very flexible and easy expandable multi chamber systems containing a central linear or radial distribution system. Bestec provides linear or radial distribution chamber systems or even complete cluster tools.
Bestec provides customized deposition systems with different possible deposition techniques (e.g. e-beam evaporation or thermal evaporation), deposition geometries, chamber base pressure and sample manipulation.
Bestec provides customized sputter systems with different possible sputter geometries, chamber base pressure and sample manipulation. The systems are applicable for a wide range of applications.
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