P468 – Mirror Unit IPE LNLS
Application
Mirror unit (M1) for soft X-ray synchrotron radiation
Year of delivery
2019
Installation site
IPE beamline at Sirius Synchrotron Light Source, LNLS Brazil
Design Features
-
Constant-strut-length hexapod mechanism.
- Six degrees of freedom and selectable rotation center.
- Spectral range: 90 – 2000 eV.
- Optical elements: one collimating mirror.
-
Active side cooling of the mirror.
- Electrode at mirror surface for carbon contamination prevention.
- Temperature sensor at mirror chin guard.
-
EtherCAT based motion control system, synchronized encoder readout (suitable for on-the-fly measurements), software with server-client architecture, TCP-IP protocol, EPICS interface.
- Adjustable support structure.
- Permanently installed bakeout provisions.
Performance Features
- High positioning resolution (minimum incremental motion).
- High stability and repeatability for all degrees of freedom.
- Minimized mounting induced deformations.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, vertical axis
Main flanges
at the top, flat polished, COF
Material
1.4404 (C < 0.02%)
Base pressure
10-10 mbar range
Optical design parameters
Beam height
1400 mm
Number of mirrors
1
Substrate shape
cylinder
Mirror dimensions
360 mm x 40 mm x 50 mm
Actuator drives for hexapod axes
Resolution (design value)
0.004 µm /motor fine step
(1/128, recommended)
0.005 µm /encoder count
Mirror mechanics
Pitch rotation
Range
± 10 mrad
Resolution (measured value)
0.20 µrad
Repeatability
0.10 µrad (pitch)
0.06 µrad (roll)
Repeatability
(1.2 l /min water flow rate)
0.10 µrad (pitch)
0.06 µrad (roll)
Stability (300 s)
< 0.03 µrad
Long-term stability
(1.5 h at 1.2 l /min water flow rate)
< 0.04 µrad
Roll rotation
Range
± 10 mrad
Resolution
< 0.20 µrad
Repeatability
0.12 µrad (pitch)
0.06 µrad (roll)
Yaw rotation
Range
± 10 mrad
Resolution
< 0.20 µrad
Repeatability
0.12 µrad (pitch)
0.06 µrad (roll)
Lateral translation
Range
± 5 mm
Resolution
< 0.10 µm
Repeatability
0.009 µm
Positioning stability
< 0.01 µm
Longitudinal translation
Range
± 5 mm
Resolution (calculated value)
< 0.10 µm
Vertical translation
Range
± 5 mm
Resolution
< 0.10 µm
Performance Test Results
Pitch deviation after pitch change
Roll deviation after pitch change
Pitch deviation after pitch change (1.2 l /min)
Roll deviation after pitch change (1.2 l /min)
Pitch deviation after roll change
Roll deviation after roll change
Pitch deviation after yaw change
Yaw deviation after yaw change
Lateral deviation after mirror translation
Mirror pitch positioning resolution
Mirror pitch long-term stability (1.2 l /min)
Residual gas analysis
