Cluster tools
Cluster tools are typically very flexible and easy expandable multi chamber systems containing a central linear or radial distribution system. Bestec provides linear or radial distribution chamber systems or even complete cluster tools with either manual transfer or fully automatic transfer.
Typical design parameters
- UHV pressure in distribution chamber system.
- Different kind of satellite chamber systems possible, e.g.
- Load lock chamber system
- Deposition chamber system
- Sample preparation chamber system
- Oxidation chamber system
- Analytic chamber system
- MBE chamber system
- Full software control possible (incl. sample transfer).
- Typically incl. Bakeout equipment.
Options
- Integration of extension ports at the distribution chamber.
- Integration of sample separation for handling of different sample shaps in differnt satelite chambers of one cluster tool.
