P506 – Mirror Unit HINESS HEPS IHEP CAS
Application
Mirror unit for soft X-ray synchrotron radiation
Year of delivery
2024
Installation site
HINESS beamline at High Energy Photon Source, Institute of High Energy Physics, China
Design Features
-
Constant-strut-length hexapod mechanism.
- Six degrees of freedom and selectable rotation center.
- Spectral range: 90 – 2000 eV.
- Optical elements: one mirror.
-
Active water cooling of the mirror.
- Electrode at mirror surface for carbon contamination prevention.
-
Four motorized, water cooled and electrically isolated OFHC baffle blades at the exit flange.
- Temperature sensors at internal mechanics, at mirror substrate and each aperture blade.
- EtherCAT based motion control system, synchronized encoder readout, software with server-client architecture, TCP-IP protocol, EPICS interface.
- Mechanically decoupled internal mechanics from the vacuum chamber.
- Internal mechanics directly connected to the adjustable support structure underneath.
- Adjustable support structure.
- Permanently installed bakeout provisions.
Performance Features
- High positioning resolution.
- High pitch rotation stability and repeatability.
- Minimized mounting induced deformations.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, vertical axis
Main flanges
at the top
Material
1.4404 (C < 0.02%)
Base pressure
10-10 mbar range
Optical design parameters
Beam height
1400 mm
Number of mirrors
1
Surface shape
plane
Mirror dimensions
480 mm x 50 mm x 18 mm
Actuator drives for hexapod axes
Resolution (design value)
0.00157 µm /motor fine step
(1/128, recommended)
0.005 µm /encoder count
Mirror mechanics
Pitch rotation
Range
≥± 5 mrad
Resolution (calculated value)
0.03 µrad
Resolution (measured value)
0.05 µrad
Repeatability
0.08 µrad (pitch)
0.05 µrad (roll)
Long-term stability (> 2h)
0.021 µrad
Long-term stability (> 2h)
1 l/min water flow rate
0.021 µrad
Long-term stability (> 2h)
2 l/min water flow rate
0.022 µrad
Roll rotation
Range
≥± 10 mrad
Resolution (calculated value)
0.08 µrad
Resolution (measured value)
0.10 µrad
Repeatability
0.06 µrad (pitch)
0.08 µrad (roll)
Long-term stability (> 2h)
0.019 µrad
Long-term stability (> 2h)
1 l/min water flow rate
0.020 µrad
Long-term stability (> 2h)
2 l/min water flow rate
0.020 µrad
Yaw rotation
Range
≥± 5 mrad
Resolution (calculated value)
0.05 µrad
Resolution (measured value)
0.10 µrad
Repeatability
0.10 µrad (pitch)
0.08 µrad (roll)
Long-term stability (2h)
0.018 µrad
Longitudinal translation
Range
≥± 5 mm
Resolution (calculated value)
9.70 nm
Resolution (measured value)
1 µm
Transversal translation
Range
≥± 5 mm
Resolution (calculated value)
11 nm
Resolution (measured value)
1 µm
Repeatability
0.10 µrad (pitch)
0.06 µrad (roll)
Vertical translation
Range
>± 10 mm
Resolution (calculated value)
1.50 nm
Resolution (measured value)
1 µm
Repeatability
0.09 µrad (pitch)
0.07 µrad (roll)
Baffle blades unit
Blades
Material
OFHC
Range
42 mm
Resolution (calculated value)
10 µm / motor step
Performance Test Results
Pitch deviation after pitch change
Roll deviation after pitch change
Pitch deviation after roll change
Roll deviation after roll change
Pitch deviation after yaw change
Roll deviation after yaw change
Pitch deviation after mirror transversal translation
Roll deviation after mirror transversal translation
Pitch deviation after mirror vertical translation
Roll deviation after mirror vertical translation
Mirror pitch positioning resolution
Mirror pitch positioning resolution
Mirror roll positioning resolution
Mirror yaw positioning resolution
Mirror longitudinal translation positioning resolution
Mirror transversal translation positioning resolution
Mirror vertical translation positioning resolution
Mirror pitch long-term stability
Mirror roll long-term stability
Mirror pitch long-term stability
(1 l/min water flow rate)
Mirror roll long-term stability
(1 l/min water flow rate)
Mirror pitch long-term stability
(2 l/min water flow rate)
Mirror roll long-term stability
(2 l/min water flow rate)
Residual gas analysis
