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Magnetron 3″ translation (0001-01376)

Target dimention

3″ diameter, 4 – 8 mm thick

Motion axes

Pneumatic driven linear motion of max. 100mm into the chamber

Shutter drive

Pneumatic (speed adjustable by gas flow control)

Chimney

Not installed

Gas inlet

Gas inlet close to the target (pneumatic or manual gas inlet valve possible)