P430 – Mirror Unit ESM NSLS-II
Application
Mirror unit (M3) for soft X-ray synchrotron radiation
Year of delivery
2015
Installation site
ESM beamline at the synchrotron radiation source NSLS-II, USA
Design Features
-
Constant-strut-length hexapod mechanism.
- Six degrees of freedom and selectable rotation center.
- Spectral range: 15 – 1500 eV.
- Optical elements: two focusing mirrors.
-
Indirect cooling of the mirrors with copper braids.
- Electrode at mirror surface.
- Temperature sensors at mirror holder and chin guard.
- Adjustable mirror holders.
- Permanently installed bakeout provisions.
- Adjustable support structure.
Performance Features
- High positioning resolution (minimum incremental motion).
- High stability and repeatability for all degrees of freedom.
- Minimized mounting induced deformations.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, vertical axis
Main flanges
at the top
Material
1.4404 (C < 0.02%)
Base pressure
10-10 mbar range
Optical design parameters
Beam height
1440 mm
Number of mirrors
2
Surface shape
elliptical cylinder
Mirror dimensions
610 mm x 50 mm x 50 mm
Actuator drives for hexapod axes
Resolution (design value)
0.004 µm /motor fine step
(1/128, recommended)
0.005 µm /encoder count
Mirror mechanics
Pitch rotation
Range
± 10 mrad
Resolution (measured value)
0.05 µrad
Repeatability
0.05 µrad (pitch)
0.05 µrad (roll)
Long-term stability (1h)
0.05 µrad
Roll rotation
Range
± 30 mrad
Resolution
0.05 µrad
Repeatability
0.12 µrad (pitch)
0.11 µrad (roll)
Lateral translation
Range
± 15 mm
Repeatability
1 µm
Adjustment ranges of
upper mirror relative
to lower mirror
Pitch
± 0.3°
Roll
± 1.7°
Yaw
± 0.4°
Lateral translation
± 4.5 mm
Performance Test Results
Pitch deviation after pitch change
Roll deviation after pitch change
Pitch deviation after roll change
Roll deviation after roll change
Mirror pitch positioning resolution
Mirror pitch long-term stability
Residual gas analysis
