P359 – Exit Slit Unit I09 DLS
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2012
Installation site
Beamline I09 at Diamond Light Source, Didcot, United Kingdom
Design Features
-
Double slit mechanism – vertically and horizontally defining slits.
- Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- Tungsten slit blades.
- Electrical isolation of horizontally defining slit blades.
-
Motorized and encoded slit unit translation along beam axis.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 0.6 µm over 10 mm edge length.
- Straightness smaller than 0.5 µm over 10 mm edgle length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Translation along beam axis
Range
± 100 mm
Resolution (design value)
0.015 mm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Horizontally defining slit (HDS)
Slit blades
Material
Tungsten
Straightness
< 1 µm over 10 mm (1σ)
Parallelism
-0.03 µm /mm
(10 µm slit opening)
0.02 µm /mm
(25 µm slit opening)
0.04 µm /mm
(50 µm slit opening)
Slit opening
Range
0 µm to 10 mm
Repeatability
± 0.03 µm
(up to 300 µm slit opening)
Resolution (design value)
0.006 mm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Vertically defining slit (VDS)
Slit blades
Material
Tungsten
Straightness
< 0.70 µm over 10 mm (1σ)
Parallelism
0.038 µm /mm
(10 µm slit opening)
-0.04 µm /mm
(25 µm slit opening)
0.006 µm /mm
(50 µm slit opening)
Slit opening
Range
0 µm to 10mm
Repeatability
± 0.04 µm
(up to 320 µm slit opening)
Resolution (design value)
0.006 mm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Performance Test Results
Slit width calibration (HDS)
Slit opening repeatability (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit width calibration (VDS)
Slit opening repeatability (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Residual gas analysis
